Atomic layer deposited alumina on black silicon : passivation, electrical properties and application to high-efficiency solar cells - von Gastrow, Guillaume; Aalto-yliopiston sähkötekniikan korkeakoulu. Elektroniikan ja nanotekniikan laitos (Aalto University publication series, ISSN 1799-4934, 2017)
Keywords: atomic layer deposition; black silicon; passivation; solar cells; Al2O3