Introduction to microfabrication
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Introduction to microfabrication
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Physical Description |
1 online resource (536 p.) |
---|---|
Language |
English |
Item Description |
Includes index. |
Publisher |
Chichester, West Sussex, England ; Hoboken, NJ :
John Wiley & Sons,
2010.
|
Classification | |
Dewey Classification |
621.381 |
Subjects | |
Additional Information | Sami Franssila |
Additional form |
0-470-29705-0 0-470-74983-0 |
ISBN |
1-119-99189-7 9786612777066 1-282-77706-8 0-470-66672-2 1-119-99041-6 |
Language Notes |
English |