Silicon-on-insulator: its technology and applications : papers presented in US-Japan Seminar on "Solid Phase Epitaxy and Interface Kinetics", held in Ōiso, Japan, June 20-24, 1983
Finna-arvio
Silicon-on-insulator: its technology and applications : papers presented in US-Japan Seminar on "Solid Phase Epitaxy and Interface Kinetics", held in Ōiso, Japan, June 20-24, 1983
Tallennettuna:
| Ulkoasu |
295 s. |
|---|---|
| Kieli |
englanti |
| Alkuteoksen kieli |
englanti |
| Julkaisija |
Tokyo :
KTK Scientific,
1985.
|
| Sarja | ASST, Advances in solid state technology, 1. |
| Luokitus | |
| Lisätiedot | ed. by S. Furukawa |
| ISBN |
90-277-1940-3 |
| Kontrolloimaton nimeke |
Solid phase epitaxy and interface kinetics |