2014 International Conference on Planarization/CMP Technology (ICPT) : 19-21 Nov. 2014, Kobe, Japan
Finna-arvio
2014 International Conference on Planarization/CMP Technology (ICPT) : 19-21 Nov. 2014, Kobe, Japan
Tallennettuna:
| Muut nimekkeet |
Proceedings of International Conference on Planarization/CMP Technology 2014 Planarization/CMP Technology |
|---|---|
| Ulkoasu |
1 online resource (355 pages) |
| Kieli |
englanti |
| Julkaisija |
Piscataway, New Jersey :
IEEE,
2014.
|
| Luokitus | |
| Dewey-luokitus |
621.38152 |
| Aiheet | |
| Lisätiedot | Institute of Electrical and Electronics Engineers |
| Muu ilmiasu |
1-4799-5558-2 1-4799-5556-6 |
| ISBN |
1-4799-5557-4 |